How EPMA works

A focussed beam of electrons excites the surface of a sample which responds by emitting X-rays. Each element emits X-rays with a characteristic wavelength, so by analysing these it is possible to determine the concentration and distribution of elements to a high degree of precision.

Schematic representation of the Electron Probe Microanalysis Our Joel JXA-8800 Electron Probe Microanalysis is equipped with three WDX spectrometersEDX-Detektor.

Advantages of this method

The method provides an exact chemical analysis of all kinds of materials with a high spatial resolution (1 – 150 µm). All elements with atomic no. 5 or higher, including the light elements O, C and N, can be detected. The detection limit lies between 10 – 500 µg/g (ppm), depending on the actual material and sample.

Examples of applications

• Chemical composition of small sample
• detailed analysis on the micrometre scale (phases, inclusions etc.)
• Composition of coatings (plasma sprayed coatings, galvanic coatings, oxide layers etc.)
• Detection of trace elements

		Element Al Si P S Ti V	(wt.%) <0.050 0.20 <0.050 0.025 <0.050 <0.050
Elemental distribution in a plasma sprayed coating. Clockwise starting upper left: SEM Micrograph, Cr, Al, O	Quantitative chemical analysis of a very small sample. The diameter of the analyzed zone is approximately 5µm	Cr Mn Co Ni Cu Nb Mo W Fe	21.2 0.82 0.28 12.5 0.45 <0.050 0.38 <0.050 Basis

Delivery

Electron Beam Microprobe Analysis can normally be delivered within 2-3 working days.

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